Dec 30, 2020 dektak 3 profilometer 12 month warranty refurbished excellent condition. Optical profilometer dektak 150 microelectronics research. Bruker dektakxt stylus profilometer california nanosystems. About select help about to view the number of the currently installed version of the dektak software. It can accommodate 100mm, 125 mm, and 150 mm wafers as well as smaller chips. User manual veeco dektak 150 user manual 349 pages. Bruker dektak xt center for nanomicromanufacturing. Apr 23, 2019 the dektak xt is a stylus profilometer. Through its combination of industry firsts, dektakxt delivers the ultimate in performance, ease. The standard dektak 150 utilizes a newdesign, 100 x 100millimeter xy stage with manual theta.
Feb 20, 2020 the dektak 3st profilometer is a stylustype surface profiler. Ebeam evaporation temescal sr10 manual tool bion 1222. It can also show the surface roughness of substrates. This tool profiles surface topography allowing measurement of step heights and lateral dimensions of features on your sample. Dektak 150 stylus surface profiler operation manual. Profilometer stylus bruker dektak xt core facilities. Therefore, sample should be planar, approximately flat and level. The automation program can be used to automate the use of the profilometer. The dektak 150 uses stylus profilometry technology, which is the accepted standard for surface topography measurements, roughness and step size.
Unload the stage by clicking on the bottom right icon in the stage control panel or. Bruker dektak xt stylus profilometer boise state university. By measuring the curvature of a sample before and after deposition. Red emergency off button the dektakxt system is equipped with a red emergency off button, located on the emo box see figure 11. Sample rtheta stage manual, continuous 360 degrees. Dektak 8 stylus profiler profilometer bruker veeco. The dektakxt stylus profiler 10th generation thin and thick film step height and surface roughness measurement tool. This major milestone in stylus profiler performance is the culmination of over fifty years of dektak innovation and industry leadership. Profilometry allows users to get a 2d trace of surface topographic features through contact with a stylus. Equipment yale institute for nanoscience and quantum. Or it can be equipped with a 6inch xy auto stage that, in addition to 3d mapping, provides automation and. It is capable of mapping step heights and displaying topological three dimensional images of substrates ranging from 200 mm. This information is collected and analyzed in the vision 64 application software.
Terek zimmerman before the worked detailed in this procedure may begin, the intended user must read and understand this document. This system operates by the stylus physically making contact with the sample. It provides data on a film thickness, or on a surface roughness and also allows the generation of 3d images. Automation packages the dektak 150 can be equipped with a 150millimeter xy auto stage that provides 3d mapping, automation and programmability of over 200 sample sites. Dektakxt stylus profilometer bruker dektakxt sdni university of california, san diego nano3 cleanroom facility metrologycharacterization. The bruker dektak profilometer measures step heights, surface profiles and roughness using a stylus with a 12. Use of this tool requires the understanding of the fundamentals of stylus type profilometer knowledge.
With 6angstrom stepheight repeatability, the dektak xt profiler provides the flexibility to perform precise stepheight measurements for thin films down to less than 100 angstroms, as well as thickfilm measurements up to several hundred microns thick. Robert white, mechanical engineering x72210 safety office. Dektak surface profilometer purchased new in 2012, excellent condition. The machine was designed with silicon electronics in mind. Bruker dektak xt s standard operating procedure faculty supervisor. Dektakxt stylus profiler with the standard manual xy sample positioning. Scope the purpose of this document is to describe requirements and basic operating instructions for the dektak xt profilometer. This document provides instructions for operating the dektak xp stylus profilometer system, which provides high resolution thin film profiling capability. The bruker dektak xt profilometer is capable of measuring stepheights, film stress, roughness, and other parameters. This video highlights the history of the stylus profiler and all the.
Dektak 6m profilometer measures the surface topography electromechanically by moving a sample beneath a diamondtipped stylus. The tool maintains a constant stylus force as the sample stage moves the sample under the stylus tip to trace a profile. Multiple scans, with different specifications, at different locations on a wafer can be programmed and executed by running this program. Dektak 3030 profilometers dektak 3030 profiler dektak 3030 profilometer eqp00847si operating modes. This tool is intended to measure thickness variation to complement deposition or etching processes. Veeco dektak 6m stylus profilometer standard operating procedure faculty supervisor. This semiautomatic profilometer can be used for single and multiple scans. The dektak is a stylus contact profilometer that is used to measure height differences steps on samples for au based processes. This document is intended to describe the operation of the bruker dektak xt. The dektakxt stylus surface profiler video is now available for high definition viewing. This machine works well with a wide range of materials except for those that are very soft or break under small amounts of force.
Vision 64 application software controls the system. Bruker dektak xt stylus profilometer the bruker dektak profilometer measures step heights, surface profiles and roughness using a stylus with a 12. Veeco dektak 150 profilometer step height stress measurement 3d mapping up to 6inch wafer. Description the dektakxt stylus profiler 10th generation thin and thick film step height and surface roughness measurement tool. The dektakxt stylus contact profilometer is the latest surface profiler with high vertical resolution 5nm with large xy scan range for 2d and 3d surface analysis. Stylus profilometer veeco dektak 8 performs contactbased 2d or 3d topography measurement to characterize film thickness, roughness, stress and defects on samples up to 200mm delivers 262 um vertical range with 1 a vertical resolution at 6. Dektakxt the dektakxt stylus profilometer features a revolutionary benchtop design that enables an unmatched repeatability of 4a and up to 40% improvement in scanning speeds. The dektak 150 is an accurale, reliable, repeatable, inexpensive device that. The dektak 150 from veeco is a surface profilometer that takes surface measurements using contact profilometry techniques. The bruker dektakxt profilometer is only for end users and are subject to prior sale without notice. This is a contact profilometer capable of measuring step heights that range from tens of nanometers to one millimeter. In the chapters that follow, the messages below indicate that special vigilance is required. Dektak xtl stylus profiler system brukers new dektak xtl stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary dektak repeatability and reproducibility to largeformat wafer and panel manufacturing. As the sample stage moves, the stylus scans over the surface of the sample.
This system operates by the stylus physically making contact with the sample surface and moving the stylus to measure changes in surface height. Ensure system is powered on by looking at the controller to the left of the computer. Help menu contents select click help contents dektak 150 manual. The dektak xt is a 2d contact profilometer used for step height, pitch and surface roughness. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. The stylus is very expensive, take caution when you load and unload your samples. The stylus force is usually set to 10mg, but can be set below 1mg for soft materials. The full user manual should be found on the desktop of the control computer. The dektak vi is a profilometer for measuring step heights or trench depths on a surface. The dektak xtl features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide.
Manual xy stage with 4 inches of travel, manual 360 degree rotation. It can also measure surface roughness and film stress. The dektak vi offers windows based data acquisition, data analysis, and equipment control. The detailed description of this is available in dektak 8m manual. It is also possible to do 3d mapping with the dektak profilometer. Veeco dektak 150 user manual pdf download manualslib. I use dektak 150 profilometer with 1 armstrong of vertical resolution. The sample and sample stage are moved laterally as the tip translates vertically to. Dektak xt profilometer standard operating procedure. Dektak xt 2d profilometer this document is intended to describe the operation of the bruker dektak xt profilometerand its capabilities. Doubleclick the dektak icon to start the dektak 150 software. The reset dektak function initializes the scan stage. Dektak 3st surface profilometer this document is intended to describe the operation of the dektak 3st surface profilometer and its capabilities. The dektak 6m is semi manual instrument which gives profile data of a sample detecting the vertical detection of a stylus in contact with the sample which is moved horizontally across the sample surface.
We have 1 veeco dektak 150 manual available for free pdf download. A diamond tip stylus is in contact with the sample surface. This tool has subnm resolution with 5a repeatability. The system provides stepheight measures of up to 1 mm with a repeatability of 0. Peter nowak x73246 just dial this directly on any campus phone. Can anyone suggest a profilometer for measuring film. Veecos newest stylus profiler system is available with three configurations to permit the best possible match to your research or industry application. Oct 06, 2017 1 dektak xt s manual package includes.
Step heights can range from 5 nm to 1 mm, with scan lengths up to 55mm. This machines detailed safety information can be read in the user manual. Dektak 3st surface profilometer engineering research. The bruker dektakxt surface profiler is a stylusbased surface profiler that is able to perform 3d scanning of surfaces to map their topography. The bruker dektak xt contact profilometer measures the thin film thickness of patterned features by sensing the deflection of a fine stylus that is raster scanning over features ranging in height from 1 mm down to 5 nm.
In order to gain access on the tool, formal qualification by staff is required. Gwc goldwater center for science and engineering, b26d. The dektak xt is a 2d contact profilometer used to provide quantitative information about step heights and surface roughness for thin and thick films measurements. Copyright bruker 2021 terms of use imprint privacy notice cookie notice social responsibility reports imprint privacy. Dektakxt profilometer standard operating procedure 1. The bruker dektak xt profilometer is capable of measuring stepheights, film stress, roughness. It features a singlearch design for increased scan stability. Dektak xt stylus profilometer mg force sensor, stylus radius options from 0025 to 50 mm, vertical resolution 01 nm, vertical range 1 mm. My first one was a dektak 6 stylus profilometer some twenty years ago, then a dektak 150, followed by a contourgt optical profiler, and most recently a dektak xt. It is an online software, hence the hardware part needs to be turned on to use the software b. By measuring the curvature of a sample before and after deposition of a thin film, the residual stress of the thin film can be determined from stoners equation.
Bruker dektak xt stylus profilometer yale institute for. Safety features several features of the dektakxt system ensure operator safety. It uses a diamondtip stylus that contacts the sample. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. To abort a dektak 150 operation, press the esc or a key on the keyboard. The dektak profilometer determines film thickness, feature heights in microfluidic devices, 3dprinted devices or feature depths in laser cut samples.
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